000			00344nam a2200133Ia 4500
005			20260413101039.0
008			230516s9999||||xx |||||||||||||| ||und||
100			_aCampbell Stephon A
245		4	_aThe Science Engg. Of Microelectronics Fabrication
260			_bOxford Uni. Press _c2013
300			_a603
942			_cGB
999			_c6395 _d6395